Find the most up-to-date version of JIS Z at Engineering JIS Z Colour specification — Specification according to their three attributes (FOREIGN STANDARD. JIS Z Colour specification — Specification according to their three attributes (FOREIGN STANDARD). Available for Subscriptions. Content Provider.
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The method of representing the measures of the three attributes is defined by JIS Z It is considered that because the firing temperature was higher and the pressure was jus than Example 3, the development of the crystal grains could progressed a little easier and the lightness became a little lower. Furthermore, viewed from this aspect, the aluminum nitride sintered body has more preferably an average particle diameter of the crystal grains of not more than 3.
The sintered body obtained by this condition showed an excessively progressed firing as compared with Example 3 and hence an increased lightness. Aluminum nitride sintered bodies were produced in the same manner as in Comparative Examples 1 – 3. As the raw material, a powder of aluminum nitride prepared by the above described direct nitriding method was used. The lightness of a multilayer coating film thus obtained is not sufficient. In addition, the lightness of the multilayer coating film thus produced is not satisfactory.
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Particularly, if a Group Ia element, a Group IIa element or a transition metal element is present in the process of producing semiconductors, such an element can cause a serious adverse influence on the semiconductor wafers and the production plant, even if the amount of the element existing in the aluminum nitride sintered body is small.
In step 3the coating film of the primer A thus adjusted is electrostatically coated with a thermosetting clear colored coating composition B. Examples of the amine compound encompass tertiary amines such as triethylamine, tributylamine, dimethylethanolamine, triethanolamine and the like; secondary amines such as dimethylamine, dibutylamine, diethanolamine and the like; and primary amines such as monoethanolamine and the like.
The aluminum nitride sintered body of claim 1, comprising a relative density of at least Black polypropylene was molded into the shape of a bumper and subjected to degreasing to produce a plastic substrate to be coated. The aluminum nitride sintered body produced by Example 3 was worked into a plate of a diameter of mm and a thickness of 10 mm.
US7150899B2 – Method for forming coating film on plastic substrate – Google Patents
That is, under such a condition the inventors have succeeded in producing a high purity aluminum nitride sintered body of a lightness of not more than N js and a relative density of at least However, when such a metal element is contained as a blackening agent in the aluminum nitride sintered body, the amount of impurities contained in the aluminum nitride sintered body is increased due to the influence of the additive.
Thermosetting Clear Colored Coating Composition B Any known colored coating composition for a base coat can be used as the thermosetting clear colored coating composition B of the invention. The aluminum nitride sintered 8271 and its production method of the present invention can be satisfactorily applicable to heating elements, such as, ceramic heaters, susceptors and the like, particularly heating members for arranging in semiconductor producing apparatuses, such as, ceramic heaters, ceramic susceptors, ceramic electrostatic chucks, ceramic susceptors accommodating high frequency metal electrodes and the like.
The usable modifier resin is acrylic resin, polyester resin, polyurethane resin or the like. The results were evaluated according to the following criterion. After coating, the coating film may also be optionally set.
Suitably used as the aqueous white primer A is one that comprises a chlorinated polyolefin, white pigment and water. Production Example 3 Production of Acrylic Resin Solution for Aqueous Coating Composition Forty parts of ethylene glycol monobutyl ether and 30 parts of isobutyl alcohol were placed in a reaction vessel equipped with a stirrer, a thermometer, a reflux condenser jsi.
For example, before a plastic substrate is electrostatically coated, an electrically conductive primer is applied to provide the substrate with electrical conductivity. Comparative Examples 2—6 The same steps as in Comparative Example 1 were followed except for the changes shown in Table 4 below, giving multilayer coating films.
The inventors have studied on the reason why the sintered body abruptly assumes black color by raising the relative density of the aluminum nitride sintered body to a very high value of at least DE Date of ref document: Although metal powders or metal fibers have high electrical conductivity, the quantity thereof required is large, decreasing the whiteness of the coating film or the stability of the coating composition, because jjs particles need to be in contact with one another in order to form electrically conductive paths through the coating film.
Aluminum nitride sintered body and semiconductor manufacturing apparatus member. In Example 3, the obtained sintered body had zz relative density of Kind code of ref document: The aluminum nitride sintered body of the present invention has a large radiation heat amount and a jjs heating property, so that it is suited most to substrates of heating members of ceramic heaters, susceptors and the like.
Ref legal event code: An aluminum nitride sintered body is provided comprising metal elements of contents of not more than ppm for each metal element except for aluminum and assuming black color of a lightness of not more than N 4 according to the definition of JIS Z The method for forming a coating film according to the above item 1, wherein the aqueous white primer A comprises a chlorinated polyolefin, white pigment and water.
The coating film had slightly poor water resistance, with 90 to 98 squares remaining. Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member. Though in the foregoing explanations the present invention was explained with 871 to specific preferable embodiments, it should of course be understood that various other manners and embodiments can be practiced without departing from the real spirit and scope of the present invention as defined in the appended claims.
Examples of the crosslinking agent are hydrophilic polyisocyanate compounds having unreacted isocyanate groups, blocked polyisocyanate compounds having the isocyanate groups blocked with a blocking agent, melamine resins, epoxy resins, carbodiimide resins, oxazoline compounds and so on. Polyester resins used as the modifier resin are typically obtained by the esterification reaction of a polybasic acid and a polyhydric alcohol.
A method of producing an aluminum nitride sintered body, when sintering a uis of aluminum nitride containing metal elements of contents of not more than ppm for each metal element except for aluminum to obtain the sintered body, the sintering is effected to obtain a sintered body of a relative density of at least The inventors have further jjis studies and as a result found out that an aluminum nitride sintered body of a lightness of not more than 4 can be produced, if the sintering is effected such that a sintered body of a relative density of at least Examples of the conductive fillers are particles of electrically conductive metal oxides such as tin oxide, antimony tin oxide ATOindium tin oxide ITOfluorine-doped tin oxide FTOphosphorus-doped tin oxide, zinc antimonate, indium-doped zinc oxide, nis oxide, rhenium oxide, silver oxide, nickel oxide, copper oxide and the like.
The most suitable white pigment to be used is rutile titanium oxide with an average particle diameter of about 0. The copolymerization of these monomers can be performed by known methods. The polyester resin may contain hydroxyl groups, and the introduction thereof can be carried out by the combined use of alcohols having three or more hydroxyl groups per molecule with dihydric alcohols.
The present invention is described in further detail in the a Production Examples, Examples and Comparative Examples. The results of these measurements are shown in Table 1.
EPA1 – Aluminum nitride sinter and production method therefor – Google Patents
The thus obtained aluminum nitride sintered bodies of Examples 2 jjs 5 were measured in the same manner as described above. Preferably, these epoxy resins have a molecular weight of about to about 20, particularly about to about 5, Other methods can also be used in combination.
According to the inventors’ study, aluminum nitride is preferably used as the substrate for such ceramic heaters and susceptors. Such a ceramic heater has been found to have superior properties, particularly in producing semiconductors.